Advanced MEMS and NEMS Technologies
Open access
Peer reviewed
Abstract
Abstract
MEMS capacitive pressure sensors are one of the major classes of pressure sensors. However, in the non-contact operating mode, their sensitivity often varies nonlinearly with the applied pressure, which increases the difficulty and workload of sensitivity evaluation at multiple pressure points during the design stage. In this study, a normalized sensitivity analysis framework for MEMS capacitive pressure sensors is established based on the large-deflection governing equations. Within this framework, the nonlinear relationship between normalized sensitivity and normalized pressure is characterized by five dimensionless parameters. The results show that, when these dimensionless parameters are identical, sensors with different combinations of structural and material parameters collapse onto nearly identical normalized sensitivity-pressure characteristic curves, with an average relative deviation not exceeding 0.05% in the verification cases. In addition, the effects of each dimensionless parameter on the nonlinear behavior of the characteristic curves are further analyzed. The proposed framework provides a unified and systematic analytical basis for sensitivity comparison, performance evaluation, and structural optimization of MEMS capacitive pressure sensors.
Direct answer
What can I do from this paper page?
Use this page to scan "Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations" quickly: start with the summary and abstract, then check the authors, source, topics, and related papers. From here, open Scollr to follow Advanced MEMS and NEMS Technologies research, save the paper, or map adjacent work.
Research areas
Follow related topics
Citation
BibTeX
@article{Cao2026Theoretical,
title = {Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations},
author = {Xiaoda Cao and Haiwang Li and Shizhe Song and Tiantong Xu and Yanxin Zhai},
journal = {Micromachines},
year = {2026},
doi = {10.3390/mi17080941},
url = {https://doi.org/10.3390/mi17080941}
}FAQ
Using this paper in a discovery workflow
How do I find related work for this paper?
Use the related papers and topic links on this page as starting points. In Scollr, you can also open the paper and build a literature map around its references, citing papers, and related work.
How can I keep up with new Advanced MEMS and NEMS Technologies research papers?
Follow Advanced MEMS and NEMS Technologies research in Scollr. New papers from the topic flow into a personalized feed, and you can save useful studies to revisit later.
Can I cite this paper from this page?
This page includes a static BibTeX block for Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations. Always verify the DOI, source, and publication details against the publisher record before submitting a manuscript.
Follow this research in Scollr
Follow the topics and authors behind this paper, save useful studies, and build a literature map when you are ready to go deeper.
Get the app