Advanced MEMS and NEMS Technologies
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Abstract
Abstract
Abstract This paper presents a MEMS accelerometer based on mode localization in electrostatically coupled resonators. The device exploits energy redistribution between weakly coupled modes to convert external acceleration into measurable amplitude localization, providing a detection mechanism with high sensitivity. Lever amplification and electrostatic tuning are introduced to enhance the inertial-to-stiffness transduction and enable controllable sensor response. Experimental results demonstrate a linear relative amplitude change ratio (RACR) sensitivity of approximately 5.1/g under specific excitation conditions. The sensitivity can be further improved by reducing coupling stiffness or introducing controlled asymmetry. These results demonstrate a scalable and tunable modal-localization-based sensing strategy, offering a promising route for high-performance MEMS inertial sensors.
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@article{Lyu2026Mode,
title = {Mode-localized uniaxial MEMS accelerometer with tunable sensitivity},
author = {Ming Lyu and Zhikun Zha and Yanmin Zhang and Bingchang Ren and Yuheng Quan and Feixuan Wei and Jian Zhao and Najib Kacem},
journal = {Physica Scripta},
year = {2026},
doi = {10.1088/1402-4896/ae9999},
url = {https://doi.org/10.1088/1402-4896/ae9999}
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