Abstract
Abstract
Abstract Off-axis Digital Holography Microscopy (DHM) systems have evolved from laboratory prototypes to mature metrology platforms with a wide range of applications that spans fields such as life sciences, material research, and semi-conductor industry. While fascinating developments of the core technology are still emerging, the main areas of development nowadays focus on specific applications to deliver dedicated technological solutions and resulting measurements metrics. DHM and its one-shot full-field capability have been particularly useful in the study of micro-electromechanical systems (MEMS) and of their dynamic behavior. However, the technology provides raw data that is different from incumbent technologies, and there is currently no benchmark method for comparing performances. In this article, we use a rigorous methodology based on fundamental noise definitions to define the detection limit of DHM for measuring MEMS amplitude displacement maps called vibration maps. We carefully evaluate the effect of all significant experimental parameters on the minimum detection level and discuss their optimization. We validate this study by measuring the vibration mode of a phononic crystal, requiring a detection level of one picometer. An intuitive reference metric related to the theoretical minimum noise for stroboscopic vibration measurements is also proposed. It can be used as a universal comparison between systems based on DHM or incumbent technologies while also allowing users to define their experimental parameters to achieve the desired resolution.
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@article{Emery2026Floor,
title = {Floor noise of vibration amplitude maps measured by digital holography microscopy (DHM)},
author = {Yves Emery and Jérôme Parent and Nicolas Pavillon and Eduardo Solanas Vilar and François Mendels and Gianmarco Colagrossi and Louis Jaugey and Tristan Colomb and Etienne Cuche},
journal = {Journal of Physics Photonics},
year = {2026},
doi = {10.1088/2515-7647/ae88a0},
url = {https://doi.org/10.1088/2515-7647/ae88a0}
}
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